Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8047762 | Method and system for locally buffering substrate carriers in an overhead transport system for enhancing input/output capabilities of process tools | Olaf Zimmerhackl, Alfred Honold | 2011-11-01 |
| 7974726 | Method and system for removing empty carriers from process tools by controlling an association between control jobs and carrier | Konrad Rosenbaum | 2011-07-05 |