Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7990549 | Method and apparatus for optically measuring periodic structures using orthogonal azimuthal sample orientation | — | 2011-08-02 |
| 7948631 | Method and apparatus for using multiple relative reflectance measurements to determine properties of a sample using vacuum ultra violet wavelengths | — | 2011-05-24 |