SW

Steven R. Walther

VA Varian Semiconductor Equipment Associates: 3 patents #9 of 80Top 15%
📍 Saalfeld, MA: #1 of 1 inventorsTop 100%
Overall (2011): #35,220 of 364,097Top 10%
3
Patents 2011

Issued Patents 2011

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
7993698 Techniques for temperature controlled ion implantation Julian G. Blake, Jonathan Gerald England, Scott C. Holden, Reuel B. Liebert, Richard S. Muka +4 more 2011-08-09
7939424 Wafer bonding activated by ion implantation Yuri Erokhin, Paul Sullivan, Peter Nunan 2011-05-10
7935942 Technique for low-temperature ion implantation Jonathan Gerald England, Richard S. Muka, Julian G. Blake, Paul J. Murphy, Reuel B. Liebert 2011-05-03