Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8020398 | Fluid delivery mechanism for vacuum wafer processing system | Robert J. Mitchell | 2011-09-20 |
| 7977652 | Optical heater for cryogenic ion implanter surface regeneration | Jeffrey E. Krampert | 2011-07-12 |