Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8062536 | High density plasma chemical vapor deposition process | Chih-Chien Liu, Ta-Shan Tseng, Wen-Bin Shieh, Juan-Yuan Wu, Water Lur | 2011-11-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8062536 | High density plasma chemical vapor deposition process | Chih-Chien Liu, Ta-Shan Tseng, Wen-Bin Shieh, Juan-Yuan Wu, Water Lur | 2011-11-22 |