Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8021492 | Method of cleaning turbo pump and chamber/turbo pump clean process | Jui-Ling Tang, Chong-Tat Lee, Cheng-Chung Lim | 2011-09-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8021492 | Method of cleaning turbo pump and chamber/turbo pump clean process | Jui-Ling Tang, Chong-Tat Lee, Cheng-Chung Lim | 2011-09-20 |