Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8062487 | Wafer supporting device of a sputtering apparatus | Li-Chun Liang, Yu-Jen Huang, Been-long Chen, Sheng-Yih Ting | 2011-11-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8062487 | Wafer supporting device of a sputtering apparatus | Li-Chun Liang, Yu-Jen Huang, Been-long Chen, Sheng-Yih Ting | 2011-11-22 |