Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084368 | Method of forming barrier film | Masanobu Hatanaka, Kanako Tsumagari | 2011-12-27 |
| 8043963 | Semiconductor device manufacturing method and semiconductor device manufacturing apparatus | Masanobu Hatanaka, Kanako Tsumagari | 2011-10-25 |