Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8039289 | Diffusion furnaces employing ultra low mass transport systems and methods of wafer rapid diffusion processing | Richard W. Parks, Peter G. Ragay | 2011-10-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8039289 | Diffusion furnaces employing ultra low mass transport systems and methods of wafer rapid diffusion processing | Richard W. Parks, Peter G. Ragay | 2011-10-18 |