Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7993964 | Manufacturing method of semiconductor device including active layer of zinc oxide with controlled crystal lattice spacing | Takashi Hirao, Mamoru Furuta, Hiroshi Furuta, Tokiyoshi Matsuda | 2011-08-09 |
| 7981734 | Manufacturing method of thin film transistor including low resistance conductive thin films | Mamoru Furuta, Takashi Hirao, Hiroshi Furuta, Tokiyoshi Matsuda, Hiromitsu Ishii +2 more | 2011-07-19 |
| 7977169 | Semiconductor device including active layer made of zinc oxide with controlled orientations and manufacturing method thereof | Takashi Hirao, Mamoru Furuta, Hiroshi Furuta, Tokiyoshi Matsuda | 2011-07-12 |