Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8065031 | Polishing end point detection method utilizing torque change and device thereof | Takashi Fujita, Satoshi Hasegawa, Soushi Yamada, Takuji Atarashi | 2011-11-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8065031 | Polishing end point detection method utilizing torque change and device thereof | Takashi Fujita, Satoshi Hasegawa, Soushi Yamada, Takuji Atarashi | 2011-11-22 |