Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7972762 | Positive resist composition and method of forming resist pattern | Kota Atsuchi, Takahiro Nakamura, Masakazu Yamada, Kensuke Saisyo, Masaru Takeshita +2 more | 2011-07-05 |
| 7879527 | Method of producing positive resist composition, positive resist composition, and method of forming resist pattern | Kota Atsuchi, Takahiro Nakamura, Masakazu Yamada, Kensuke Saisyo | 2011-02-01 |