Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7924400 | Method for measuring liquid immersion lithography soluble fraction in organic film | Nobuyuki Kohda, Masaaki Yoshida, Takayuki Yajima | 2011-04-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7924400 | Method for measuring liquid immersion lithography soluble fraction in organic film | Nobuyuki Kohda, Masaaki Yoshida, Takayuki Yajima | 2011-04-12 |