Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8029224 | Substrate transfer apparatus, substrate transfer method, and storage medium | Mitsuru Obara, Takahiro Abe | 2011-10-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8029224 | Substrate transfer apparatus, substrate transfer method, and storage medium | Mitsuru Obara, Takahiro Abe | 2011-10-04 |