Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7954452 | Film formation apparatus for semiconductor process and method for using the same | Hitoshi Kato | 2011-06-07 |
| 7883076 | Semiconductor processing system and vaporizer | Shigeyuki Okura | 2011-02-08 |
| 7874316 | Purge gas unit and purge gas supply integrated unit | Yoji Mori, Takeya Inagaki, Akihito Sugino | 2011-01-25 |