TH

Toshiharu Hirata

TL Tokyo Electron Limited: 1 patents #261 of 712Top 40%
📍 Yamanashi, NY: #3 of 3 inventorsTop 100%
Overall (2011): #143,196 of 364,097Top 40%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7972649 Thin film forming method and thin film forming apparatus — 2011-07-05