Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7908995 | Stage apparatus and application processing apparatus | Tsuyoshi Yamasaki, Kazuhito Miyazaki | 2011-03-22 |
| 7905195 | Floating-type substrate conveying and processing apparatus | Tsuyoshi Yamasaki, Kenya Shinozaki, Kimio Motoda | 2011-03-15 |