TK

Tomohito Komatsu

TL Tokyo Electron Limited: 1 patents #261 of 712Top 40%
📍 Yamanashi, JP: #95 of 243 inventorsTop 40%
Overall (2011): #142,508 of 364,097Top 40%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8055125 Substrate stage mechanism and substrate processing apparatus — 2011-11-08