Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8055376 | Substrate processing system, substrate placing position adjusting method and storage medium | Yuichi Doki | 2011-11-08 |
| 7884622 | Method of adjusting moving position of transfer arm and position detecting jig | Yuichi Doki, Koji Mahara | 2011-02-08 |