TG

Tetsuya Goto

FS Foundation For Advancement Of International Science: 1 patents #3 of 7Top 45%
Overall (2011): #150,189 of 364,097Top 45%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7879182 Shower plate, plasma processing apparatus, and product manufacturing method Tadahiro Ohmi, Masaki Hirayama 2011-02-01