Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7931749 | Shower head and film-forming device using the same | Manabu Amikura | 2011-04-26 |
| 7887873 | Gasification monitor, method for detecting mist, film forming method and film forming apparatus | — | 2011-02-15 |