TH

Takahiro Horiguchi

TL Tokyo Electron Limited: 1 patents #261 of 712Top 40%
Overall (2011): #154,249 of 364,097Top 45%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7934468 Plasma processing apparatus and plasma processing method — 2011-05-03