SW

Shinji Wakabayashi

TL Tokyo Electron Limited: 2 patents #132 of 712Top 20%
📍 Yamanashi, JP: #44 of 243 inventorsTop 20%
Overall (2011): #66,958 of 364,097Top 20%
2
Patents 2011

Issued Patents 2011

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
8025475 Wafer transfer apparatus, wafer transfer method and storage medium 2011-09-27
8021513 Substrate carrying apparatus and substrate carrying method 2011-09-20