Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7932017 | Method of double patterning a thin film using a developable anti-reflective coating and a developable organic planarization layer | — | 2011-04-26 |
| 7883835 | Method for double patterning a thin film | Sandra Hyland | 2011-02-08 |
| 7862985 | Method for double patterning a developable anti-reflective coating | — | 2011-01-04 |