Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7988062 | Temperature control device for target substrate, temperature control method and plasma processing apparatus including same | Koichi Murakami | 2011-08-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7988062 | Temperature control device for target substrate, temperature control method and plasma processing apparatus including same | Koichi Murakami | 2011-08-02 |