Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8012442 | Method of forming mixed rare earth nitride and aluminum nitride films by atomic layer deposition | — | 2011-09-06 |
| 8003503 | Method of integrating stress into a gate stack | — | 2011-08-23 |
| 7964515 | Method of forming high-dielectric constant films for semiconductor devices | Cory Wajda | 2011-06-21 |
| 7939455 | Method for forming strained silicon nitride films and a device containing such films | — | 2011-05-10 |