MO

Mitsunori Ohata

TL Tokyo Electron Limited: 2 patents #132 of 712Top 20%
📍 Taiwa, MA: #1 of 1 inventorsTop 100%
Overall (2011): #78,426 of 364,097Top 25%
2
Patents 2011

Issued Patents 2011

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
8084720 High rate method for stable temperature control of a substrate — 2011-12-27
7893387 High rate method for stable temperature control of a substrate — 2011-02-22