Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048226 | Method and system for improving deposition uniformity in a vapor deposition system | James Grootegoed | 2011-11-01 |
| 7959775 | Thermal stress-failure-resistant dielectric windows in vacuum processing systems | Ronald Nasman | 2011-06-14 |