Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8012859 | Atomic layer deposition of silicon and silicon-containing films | Raymond Joe | 2011-09-06 |
| 7964441 | Catalyst-assisted atomic layer deposition of silicon-containing films with integrated in-situ reactive treatment | Raymond Joe | 2011-06-21 |