MH

Masataka Hatta

TL Tokyo Electron Limited: 1 patents #261 of 712Top 40%
Overall (2011): #227,671 of 364,097Top 65%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7975759 Temperature control method, temperature control apparatus and high/low temperature processing system Yoshinao Kono, Toshikazu Ariyama, Kazuki Hosaka 2011-07-12