Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8057603 | Method of cleaning substrate processing chamber, storage medium, and substrate processing chamber | Yutaka Matsui | 2011-11-15 |
| 7895970 | Structure for plasma processing chamber, plasma processing chamber, plasma processing apparatus, and plasma processing chamber component | Toshihiro Hayami, Yutaka Matsui | 2011-03-01 |
| 7883631 | Plasma etching method, plasma etching apparatus, control program and computer-readable storage medium | Akinori Kitamura, Nozomi Hirai | 2011-02-08 |
| 7883632 | Plasma processing method | Yutaka Matsui, Manabu Sato | 2011-02-08 |