KA

Kimiya Aoki

TL Tokyo Electron Limited: 1 patents #261 of 712Top 40%
Overall (2011): #243,276 of 364,097Top 70%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7926445 Oxidizing method and oxidizing unit for object to be processed Keisuke Suzuki, Toshiyuki Ikeuchi 2011-04-19