Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8078552 | Autonomous adaptive system and method for improving semiconductor manufacturing quality | Sanjeev Kaushal, Sukesh Janubhai Patel | 2011-12-13 |
| 8026113 | Method of monitoring a semiconductor processing system using a wireless sensor network | Sanjeev Kaushal, Donthineni Ramesh Kumar Rao | 2011-09-27 |