Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8033823 | Heat processing apparatus | Kazuhiko Kato | 2011-10-11 |
| 7888622 | Heat-processing furnace and manufacturing method thereof | Kenichi Yamaga, Makoto Kobayashi | 2011-02-15 |
| 7862638 | Gas supply system for semiconductor manufacturing apparatus | Shuji Moriya | 2011-01-04 |