JY

Jun Yamashita

TL Tokyo Electron Limited: 1 patents #261 of 712Top 40%
Overall (2011): #252,874 of 364,097Top 70%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7981218 Substrate supporting mechanism and substrate processing apparatus — 2011-07-19