Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8028655 | Plasma processing system with locally-efficient inductive plasma coupling | Rodney L. Robison | 2011-10-04 |
| 7976674 | Embedded multi-inductive large area plasma source | — | 2011-07-12 |
| 7867409 | Control of ion angular distribution function at wafer surface | — | 2011-01-11 |