Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8002895 | Heat processing apparatus for semiconductor process | Atsushi Endo | 2011-08-23 |
| 7935188 | Vertical thermal processing apparatus and method of using the same | Wataru Nakajima, Takuya Oikawa | 2011-05-03 |
| 7907747 | Device, method, and recording medium for embedding/detecting a digital watermark | Masataka Ejima, Kenichi Noridomi | 2011-03-15 |
| 7900579 | Heat treatment method wherein the substrate holder is composed of two holder constituting bodies that move relative to each other | Shunichi Matsumoto, Yasushi Takeuchi | 2011-03-08 |