HS

Hiroshi Shinya

TL Tokyo Electron Limited: 1 patents #261 of 712Top 40%
Overall (2011): #285,078 of 364,097Top 80%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7980003 Heat processing apparatus and heat processing method Shigeki Aoki, Yuichi Sakai, Mitsuo Yamashita 2011-07-19