Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7931945 | Film forming method | Tsukasa Matsuda, Kyoko Ikeda | 2011-04-26 |
| 7894059 | Film formation processing apparatus and method for determining an end-point of a cleaning process | Tsukasa Matsuda, Kyoko Ikeda | 2011-02-22 |
| 7879179 | Processing apparatus with a chamber having therein a high-corrosion-resistant sprayed film | — | 2011-02-01 |