Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8039049 | Treatment of low dielectric constant films using a batch processing system | Dorel I. Toma | 2011-10-18 |
| 7977256 | Method for removing a pore-generating material from an uncured low-k dielectric film | Junjun Liu, Dorel I. Toma | 2011-07-12 |
| 7901743 | Plasma-assisted vapor phase treatment of low dielectric constant films using a batch processing system | Dorel I. Toma | 2011-03-08 |