CT

Cai Zhong Tian

TL Tokyo Electron Limited: 1 patents #261 of 712Top 40%
Overall (2011): #337,929 of 364,097Top 95%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7993488 Microwave plasma processing device and gate valve for microwave plasma processing device Sunao Muraoka, Hideki Nagaoka, Masakazu Ban 2011-08-09