Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8043432 | Atomic layer deposition systems and methods | — | 2011-10-25 |
| 7994070 | Low-temperature dielectric film formation by chemical vapor deposition | Kimberly Gay Reid | 2011-08-09 |
| 7910494 | Thermal processing furnace, gas delivery system therefor, and methods for delivering a process gas thereto | Eric J. Malstrom | 2011-03-22 |