Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7897498 | Method for manufacturing semiconductor device | Glenn W. Gale, Yoshihiro Hirota, Yusuke Muraki, Genji Nakamura, Masato Kushibiki +3 more | 2011-03-01 |
| 7871532 | Plasma processing method and post-processing method | Kosuke Ogasawara, Susumu Saito | 2011-01-18 |