Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8043469 | Substrate processing method, substrate processing apparatus, and storage medium | Mitsunori Nakamori, Yusuke Saito, Satoru Tanaka, Yuji Murakami | 2011-10-25 |
| 7964759 | Method for producing 3,3,3-trifluoropropyne | Yasuo Hibino | 2011-06-21 |