AK

Akihiro Kubo

TL Tokyo Electron Limited: 1 patents #261 of 712Top 40%
Overall (2011): #360,320 of 364,097Top 100%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7947926 Heat treatment apparatus, heat treatment method, and recording medium recording program for practicing the method Katsuhisa Fujii, Tetsuya Oda 2011-05-24