Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8049903 | High resolution monitoring of CD variations | Ilya Grodnensky, Heath A. Pois | 2011-11-01 |
| 7982867 | Methods for depth profiling in semiconductors using modulated optical reflectance technology | Alex Salnik, Lena Nicolaides | 2011-07-19 |
| 7933026 | High resolution monitoring of CD variations | Ilya Grodnensky, Heath A. Pois | 2011-04-26 |