Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7931850 | Nanometer-scale ablation using focused, coherent extreme ultraviolet/soft x-ray light | Carmen S. Menoni, Jorge J. Rocca, Georgiy O. Vaschenko, Scott Bloom, Erik H. Anderson +1 more | 2011-04-26 |