Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8062547 | CMP slurry, preparation method thereof and method of polishing substrate using the same | Un-gyu Paik, Jea Gun Park, Sang Kyun Kim, Ye Hwan Kim, Myoung Suh | 2011-11-22 |