Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7910936 | N2 based plasma treatment for enhanced sidewall smoothing and pore sealing of porous low-k dielectric films | Patricia B. Smith, Changming Jin | 2011-03-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7910936 | N2 based plasma treatment for enhanced sidewall smoothing and pore sealing of porous low-k dielectric films | Patricia B. Smith, Changming Jin | 2011-03-22 |