Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8053252 | Mitigation of edge degradation in ferroelectric memory devices through plasma etch clean | Kezhakkedath R. Udayakumar, Francis G. Celii, Scott R. Summerfelt | 2011-11-08 |